Search Results1-4 of  4

  • Saigo Kazutaka ID: 9000024963026

    Articles in CiNii:1

    • Removal method of nano-cut debris for photomask repair using an atomic force microscopy system (Special issue: Scanning probe microscopy) (2009)
  • Saigo Kazutaka ID: 9000258648442

    Shizuoka University (2008 from CiNii)

    Articles in CiNii:1

    • Removal method of nano cutting debris in process of AFM photomask repairing (2008)
  • Saigo Kazutaka ID: 9000283811697

    Shizuoka University (2007 from CiNii)

    Articles in CiNii:1

    • Removing method of nano cutting particles in process of AFM ultrasonic scratching (2007)
  • Saigo Kazutaka ID: 9000401782174

    Articles in CiNii:1

    • Removal Method of Nano-Cut Debris for Photomask Repair Using an Atomic Force Microscopy System (2009)
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