Search Results1-12 of  12

  • Sugiyama Yoshinari ID: 9000009661255

    Articles in CiNii:1

    • Miniaturized Capillary Electrophoresis Fabricated on Pyrex Glass Chips Using Deep Dry Etching and Anodic Bonding (2002)
  • Sugiyama Yoshinari ID: 9000016555821

    Articles in CiNii:1

    • Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for MEMS fabrication (2004)
  • Sugiyama Yoshinari ID: 9000024965587

    Articles in CiNii:1

    • Fabrication of glassy carbon molds using hydrogen silsesquioxane patterned by electron beam lithography as O2 dry etching mask (Special issue: Microprocesses and nanotechnology) (2008)
  • Sugiyama Yoshinari ID: 9000253030249

    Department of Electrical and Electronics Engineering, Toyo University (2002 from CiNii)

    Articles in CiNii:1

    • Miniaturized Capillary Electrophoresis Fabricated on Pyrex Glass Chips Using Deep Dry Etching and Anodic Bonding. (2002)
  • Sugiyama Yoshinari ID: 9000257785038

    Application and Technical Section, ELIONIX INC., Japan (2009 from CiNii)

    Articles in CiNii:1

    • Nanofabrication of Three-Dimensional Imprint Diamond Molds by ECR Oxygen Ion Beams Using Polysiloxane (2009)
  • Sugiyama Yoshinari ID: 9000258644379

    Elionix inc. (2005 from CiNii)

    Articles in CiNii:1

    • Fabrication of diffraction grating for X-ray Talbot interferometer (2005)
  • Sugiyama Yoshinari ID: 9000283811779

    ELIONIX INC. (2007 from CiNii)

    Articles in CiNii:1

    • Fabrication of nano-structure on GC using dry etching (2007)
  • Sugiyama Yoshinari ID: 9000283847539

    ELIONIX (2010 from CiNii)

    Articles in CiNii:1

    • Fabrication of Diamond Nano-dot Patterns by Room-temperature Curing Nanoimprint Lithography using Hard Carbon Molds (2010)
  • Sugiyama Yoshinari ID: 9000283847546

    ELIONIX (2010 from CiNii)

    Articles in CiNii:1

    • Fabrication of Diamond Nano-dot Arrays by Room-temperature Curing Imprint Lithography using Diamond Molds. (2010)
  • Sugiyama Yoshinari ID: 9000283847605

    ELIONIX (2010 from CiNii)

    Articles in CiNii:1

    • Nanopattering of Polysiloxane Fabricated by Room-tempurature Curing Imprint Lithography using Glass-like Carbons (2010)
  • Sugiyama Yoshinari ID: 9000347177053

    ELIONIX (2014 from CiNii)

    Articles in CiNii:1

    • はしご型HSQを用いた室温硬化ナノインプリント法による微細構造OLEDの開発 (2014)
  • Sugiyama Yoshinari ID: 9000402043055

    Articles in CiNii:1

    • Silica imprint templates with concave patterns from single-digit nanometers fabricated by electron beam lithography involving argon ion beam milling (2017)
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