Search Results1-20 of  79

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  • Takeda Keigo ID: 9000025121115

    Articles in CiNii:1

    • Effect of low level O2 addition to N2 on surface cleaning by nonequilibrium atmospheric-pressure pulsed remote plasma (2007)
  • Takeda Keigo ID: 9000242139635

    Articles in CiNii:1

    • Field Emissions from Organic Nanorods Armored with Metal Nanoparticles (2013)
  • TAKEDA Keigo ID: 9000001389623

    Faculty of System Eng., Wakayama University (2004 from CiNii)

    Articles in CiNii:1

    • Temperature-Measurement System Using Optical Fiber-Type Low-Coherence Interferometry for MultiLayered Substrate (2004)
  • TAKEDA Keigo ID: 9000002175877

    Electrical Engineering & Computer Science, Graduate School of Engineering, Nagoya University (2007 from CiNii)

    Articles in CiNii:1

    • Si Oxidation Mechanism in Ar/O_2 Surface Wave Plasma (2007)
  • TAKEDA Keigo ID: 9000004738304

    Articles in CiNii:11

    • Temperature and Thickness Sensor using Optical Fiber-type Low-coherence Interferometer (2004)
    • Dry De-smear of Via Bottom Residue Using 60 Hz Nonequilibrium Atmospheric Pressure Plasma with Trifluoromethyle Trifluorovinyl Ether Mixing Gas (2012)
    • Wafer-temperature measurement using low-coherence interferometer on plasma processing (2012)
  • TAKEDA Keigo ID: 9000014255346

    Dept. of Electrical and Electronic Engineering, Shinshu University (1995 from CiNii)

    Articles in CiNii:1

    • The Basic Characteristics of A Comb-teeth Type Electrostatic Microactuator (1995)
  • TAKEDA Keigo ID: 9000016652183

    Department of Electrical Engineering and Computer Science, Nagoya University (2012 from CiNii)

    Articles in CiNii:2

    • Combinatorial Plasma Etching Process (2009)
    • Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source (2012)
  • TAKEDA Keigo ID: 9000016652498

    Seiko Epson Corporation (2009 from CiNii)

    Articles in CiNii:2

    • Trends of the increased brightness and miniaturization of projectors, and applications of laser light sources for projection displays (2009)
    • ブロジェクター用LED光源 (特集 LED照明の最近の動向) (2007)
  • TAKEDA Keigo ID: 9000019052162

    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University (2011 from CiNii)

    Articles in CiNii:1

    • Inactivation of Penicillium digitatum Spores by a High-Density Ground-State Atomic Oxygen-Radical Source Employing an Atmospheric-Pressure Plasma (2011)
  • TAKEDA Keigo ID: 9000020934087

    Department of Electrical Engineering and Computer Science, Nagoya University (2012 from CiNii)

    Articles in CiNii:1

    • Dry De-smear of Via Bottom Residue Using 60 Hz Nonequilibrium Atmospheric Pressure Plasma with Trifluoromethyle Trifluorovinyl Ether Mixing Gas (2012)
  • TAKEDA Keigo ID: 9000107338211

    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University (2011 from CiNii)

    Articles in CiNii:1

    • Laser Scattering Diagnosis of a 60-Hz Non-Equilibrium Atmospheric Pressure Plasma Jet (2011)
  • TAKEDA Keigo ID: 9000107347990

    Department of Quantum Engineering, Nagoya University (2004 from CiNii)

    Articles in CiNii:1

    • A Novel Silicon-Dioxide Etching Process Employing Pulse-Modulated Electron-Beam-Excited Plasma (2004)
  • TAKEDA Keigo ID: 9000107351242

    Department of Electrical Engineering and Computer Science, Nagoya University (2010 from CiNii)

    Articles in CiNii:1

    • Measurement of Hydrogen Radical Density and Its Impact on Reduction of Copper Oxide in Atmospheric-Pressure Remote Plasma Using H_2 and Ar Mixture Gases (2010)
  • TAKEDA Keigo ID: 9000107361220

    Department of Electrical Engineering and Computer Science, Nagoya University (2010 from CiNii)

    Articles in CiNii:1

    • Dependence of Surface-Loss Probability of Hydrogen Atom on Pressures in Very High Frequency Parallel-Plate Capacitively Coupled Plasma (2010)
  • TAKEDA Keigo ID: 9000261052288

    Graduate School of Engineering, Nagoya University (2013 from CiNii)

    Articles in CiNii:1

    • A High-Temperature Nitrogen Plasma Etching for Preserving Smooth and Stoichiometric GaN Surface (2013)
  • TAKEDA Keigo ID: 9000345342836

    Fusion Research and Development Directorate, Japan Atomic Energy Agency (2016 from CiNii)

    Articles in CiNii:1

    • Neutron Transport Analysis of the Processes Affecting the in situ Calibration of ITER In-Vessel Neutron Flux Monitors Equipped with a Micro-Fission Chamber System (2016)
  • TAKEDA Keigo ID: 9000411202937

    Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo University (2021 from CiNii)

    Articles in CiNii:1

    • Various applications of process plasma measurement with vacuum ultraviolet absorption spectroscopy (2021)
  • Takeda Keigo ID: 9000025032223

    Articles in CiNii:1

    • Surface loss probability of nitrogen atom on stainless-steel in N2 plasma afterglow (2010)
  • Takeda Keigo ID: 9000053500643

    Articles in CiNii:1

    • Vacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation (2012)
  • Takeda Keigo ID: 9000064152288

    Articles in CiNii:1

    • Feature Profiles on Plasma Etch of Organic Films by a Temporal Control of Radical Densities and Real-Time Monitoring of Substrate Temperature (2012)
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