Search Results1-1 of  1

  • TSURUMI Yosuke ID: 9000002115183

    Institute of Laser Engineering, Osaka University (2010 from CiNii)

    Articles in CiNii:3

    • Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer (2008)
    • Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS (2009)
    • Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS (2010)
Page Top