Search Results1-20 of  44

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  • Tanimura Yoshihisa ID: 9000007532170

    Articles in CiNii:1

    • Effects of phase changes on reflection and their wavelength dependence in optical profilometry (1998)
  • Tanimura Yoshihisa ID: 9000007532529

    Articles in CiNii:1

    • A New Differential Laser Interferometer with a Multiplied Optical Path Difference (1985)
  • Tanimura Yoshihisa ID: 9000007532540

    Articles in CiNii:1

    • Micro-Shapes and Their Edge Signals Measured by Laser Interferometer (1985)
  • Tanimura Yoshihisa ID: 9000007532696

    Articles in CiNii:4

    • Speed Control Characteristics and Digital Servosystem of a Circular Traveling Wave Motor (1987)
    • Development of an Attitude Control Device for a Small Specimen in an SEM (1989)
    • A Metrological Electron Microscope System for Microfeatures of Very Large Scale Integrated Circuits (1990)
  • Tanimura Yoshihisa ID: 9000007532730

    Articles in CiNii:1

    • A Practical Calibration Method for Vibration Pickups (1988)
  • Tanimura Yoshihisa ID: 9000007532768

    Articles in CiNii:1

    • Linewidth Measuring Instrument For Micropatterns Like VLSI (1989)
  • Tanimura Yoshihisa ID: 9000007532786

    Articles in CiNii:1

    • Micro-scanning Table Realizing Smooth Motion to a Few Nanometer (1988)
  • Tanimura Yoshihisa ID: 9000007532796

    Articles in CiNii:1

    • Program and Performance for Internationlal Comparison of Angle Standards (1988)
  • Tanimura Yoshihisa ID: 9000007532797

    Articles in CiNii:1

    • Small Step Height Calibrated by Laser/Stylus Sensing Device (1988)
  • Tanimura Yoshihisa ID: 9000007533140

    Articles in CiNii:1

    • Measurement of phase change of light on reflection (1993)
  • Tanimura Yoshihisa ID: 9000007533541

    Articles in CiNii:1

    • Uncertainty Analysis of the Measurement for APMP Intercomparison of Surface Roughness (1999)
  • Tanimura Yoshihisa ID: 9000007533622

    Articles in CiNii:1

    • Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology (2000)
  • TANIMURA Yoshihisa ID: 9000000037618

    Mechanical Metrology Department, National Research Laboratory of Metrology (1998 from CiNii)

    Articles in CiNii:1

    • Standards of Surface Roughness (1998)
  • TANIMURA Yoshihisa ID: 9000002883618

    Articles in CiNii:8

    • Handy Measuring Method of the Lead Error on Leadscrews with Automatic Accumulating Device (1968)
    • Measurement of Carriage Feeding Accuracy with Laser (1970)
    • Lead Measuring Machine of Leadscrews with Laser Interferometer (1971)
  • TANIMURA Yoshihisa ID: 9000014333851

    独立行政法人 産業技術総合研究所 (2002 from CiNii)

    Articles in CiNii:1

    • Frontiers of Precision Engineering (2002)
  • TANIMURA Yoshihisa ID: 9000020010703

    Articles in CiNii:1

    • Thermal Expansion of a Leadscrew (1971)
  • TANIMURA Yoshihisa ID: 9000020249959

    Articles in CiNii:1

    • A Study on Thermal Expansion of Leadscrews (1970)
  • TANIMURA Yoshihisa ID: 9000020655155

    Articles in CiNii:1

    • Tendency of ISO on standardization of surface defects. (1987)
  • TANIMURA Yoshihisa ID: 9000020692027

    Articles in CiNii:1

    • Reflection device of autocollimator for measuring three components of angular alignment. (1987)
  • TANIMURA Yoshihisa ID: 9000020698995

    Articles in CiNii:1

    • Small laser interferometer linked to laser source with an optical fiber. (1989)
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