Search Results1-20 of  21

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  • UEKUSA Shin-ichiro ID: 9000001699198

    Department of Electronics and Communication, School of Science and Technology, Meiji University (1994 from CiNii)

    Articles in CiNii:1

    • Stability Evaluation of Inference Methods for Optoelectronic Fuzzy Inference System (1994)
  • UEKUSA Shin-ichiro ID: 9000005558780

    Department of Electrical Engineering School of Science and Technology, Meiji University (2002 from CiNii)

    Articles in CiNii:3

    • Effect of Multiple-Step Annealing on the Formation of Semiconducting β-FeSi_2 and Metallic α-Fe_2Si_5 on Si(100)by Ion Beam Synthesis (1997)
    • Evaluation of Oxygen-Plasma Damage in GaAs Exposed to a Surface-Wave Plasma Source Developed for the Ashing Process (2001)
    • Oxygen Plasma Damage in GaAs Directly Exposed to Surface-Wave Plasma (2002)
  • UEKUSA Shin-ichiro ID: 9000006465683

    Department of Electrical and Electronic Engineering, Meiji University (2002 from CiNii)

    Articles in CiNii:1

    • Characterizaiton of a New Cleaning Method Using Electrolytic Ionized Water for Polysilicon Chemical Mechanical Polishing Process (2002)
  • UEKUSA Shin-ichiro ID: 9000107335724

    Department of Electrical and Electronic Engineering, Meiji University (2003 from CiNii)

    Articles in CiNii:1

    • Development of Dishing-less Slurry for Polysilicon Chemical-Mechanical Polishing Process (2003)
  • UEKUSA Shin-ichiro ID: 9000252844939

    Department of Electrical Engineering, School of Engineering, Meiji University (1986 from CiNii)

    Articles in CiNii:1

    • The Light Emitting Pattern and Crystal Orientation of GaP Studied by Schottky Probe Method (1986)
  • UEKUSA Shin-ichiro ID: 9000005561191

    School of Science and Technology, Meiji University (1994 from CiNii)

    Articles in CiNii:1

    • Infrared Thermal Chemical Vapor Deposition of Thin SiN Film on InP : Dependence of Deposition Rate and Film Characteristics on Pressure and Gas Flux Ratio (1994)
  • Uekusa Shin-ichiro ID: 9000258163356

    Department of Electrical and Electronic Engineering, Meiji University, Tama-ku, Kawasaki 214-8571, Japan (2002 from CiNii)

    Articles in CiNii:1

    • Characterization of a New Cleaning Method Using Electrolytic Ionized Water for Polysilicon Chemical Mechanical Polishing Process. (2002)
  • Uekusa Shin-ichiro ID: 9000283571912

    School of Science and Technology, Meiji University, Japan (2012 from CiNii)

    Articles in CiNii:1

    • Deposition of TaN Films by RF Sputtering and Their Barrier Properties in Cu/TaN/Dielectrics/Si MIS Structures (2012)
  • Uekusa Shin-ichiro ID: 9000401599603

    Articles in CiNii:1

    • InPPNJunction Waveguide Made by Mg-Ion Implantation (1986)
  • Uekusa Shin-ichiro ID: 9000401602005

    Articles in CiNii:1

    • Self-Aligned Inversion-Mode lnP MISFET (1987)
  • Uekusa Shin-ichiro ID: 9000401641292

    Articles in CiNii:1

    • Infrared Thermal Chemical Vapor Deposition of Thin SiN Film on InP: Dependence of Deposition Rate and Film Characteristics on Pressure and Gas Flux Ratio (1994)
  • Uekusa Shin-ichiro ID: 9000401663799

    Articles in CiNii:1

    • Effect of Multiple-Step Annealing on the Formation of Semiconducting β-FeSi2and Metallic α-Fe2Si5on Si (100) by Ion Beam Synthesis (1997)
  • Uekusa Shin-ichiro ID: 9000401700543

    Articles in CiNii:1

    • Evaluation of Oxygen-Plasma Damage in GaAs Exposed to a Surface-Wave Plasma Source Developed for the Ashing Process (2001)
  • Uekusa Shin-ichiro ID: 9000401708916

    Articles in CiNii:1

    • Characterization of a New Cleaning Method Using Electrolytic Ionized Water for Polysilicon Chemical Mechanical Polishing Process (2002)
  • Uekusa Shin-ichiro ID: 9000401709598

    Articles in CiNii:1

    • Oxygen Plasma Damage in GaAs Directly Exposed to Surface-Wave Plasma (2002)
  • Uekusa Shin-ichiro ID: 9000401718810

    Articles in CiNii:1

    • Development of Dishing-less Slurry for Polysilicon Chemical-Mechanical Polishing Process (2003)
  • Uekusa Shin-ichiro ID: 1000010061970

    Articles in CiNii:25

    • 光集積用薄膜導波路の伝搬モ-ド (1979)
    • ネオジウムガラスレ-ザ-の製作とその基本特性 (1978)
    • LPE炉の設計と製作 (1980)
  • Uekusa Shin-ichiro ID: 9000252957711

    Department of Electrical Engineering, Meiji University (1986 from CiNii)

    Articles in CiNii:1

    • InP <I>PN</I> Junction Waveguide Made by Mg-Ion Implantation (1986)
  • Uekusa Shin-ichiro ID: 9000252959722

    School of Engineering, Meiji University (1987 from CiNii)

    Articles in CiNii:1

    • Self-Aligned Inversion-Mode InP MISFET (1987)
  • Uekusa Shin-ichiro ID: 9000392702750

    Articles in CiNii:1

    • Self-Aligned Inversion-Mode InP MISFET (1987)
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