Search Results1-20 of  30

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  • UNE Atsunobu ID: 9000002884319

    日本電信電話(株) LSI研究所 (1993 from CiNii)

    Articles in CiNii:15

    • SORリソグラフィ技術 (1993)
    • The Correlation between the Properties of Sintered Iron and the Cutting Phenomena (1974)
    • Deformation of Aluminum Alloy Plates for Magnetic Disks : Residual Stress and Deformation by Lapping (1st Report) (1975)
  • UNE Atsunobu ID: 9000002956251

    防衛大学校 (2012 from CiNii)

    Articles in CiNii:72

    • 真空ピンチャックによる平面矯正 (1996)
    • 真空ピンチャックによる平面矯正(第2報) -ピン支持研磨によるディンプルの発生- (1997)
    • 金属円盤によるCVDダイヤモンドの研磨機構 (1997)
  • UNE Atsunobu ID: 9000018290263

    防衛大学校システム工学群機械工学科 (2004 from CiNii)

    Articles in CiNii:2

    • 超精密ラッピング・ポリシング (2000)
    • Development of Next-Generation CMP System : Technical Development of Ultra-Low Pressure Polishing and Local Polishing (2004)
  • UNE Atsunobu ID: 9000019957036

    防衛大学校 (2011 from CiNii)

    Articles in CiNii:1

    • Development of a Nondeforming Freezing Pin Chuck (1st Report) (2011)
  • UNE Atsunobu ID: 9000019962079

    防衛大学校 (2010 from CiNii)

    Articles in CiNii:1

    • Lapping Simulation Based on the Gap Theory (2nd Report):—Oscillation Lapping with a Small Tool— (2010)
  • UNE Atsunobu ID: 9000020652131

    Articles in CiNii:1

    • A vertical x-ray stepper for SOR lithography. (1991)
  • UNE Atsunobu ID: 9000020732966

    Articles in CiNii:1

    • A New Gap Detection Technique Using an Optical-Heterodyne Interferometry. (1991)
  • UNE Atsunobu ID: 9000020753041

    Articles in CiNii:1

    • A High Accuracy Grating Alignment Technique (1st Report):Gap and Position Detection using Single and Dual Gratings (1987)
  • UNE Atsunobu ID: 9000020757881

    Articles in CiNii:1

    • A high accuracy grating alignment technique. (2nd report). Alignment using double-pitch dual gratings.:Alignment using Double-pitch Dual Gratings (1989)
  • UNE Atsunobu ID: 9000020759817

    Articles in CiNii:1

    • A high accuracy grating alignment technique. (3rd Report). Adaptability of single and double-pitch dual grating method for semiconductor processing.:Adaptability of Single and Double-pitch Dual Grating Method for Semiconductor Processing (1989)
  • UNE Atsunobu ID: 9000020769000

    Articles in CiNii:1

    • An optical-heterodyne interferometry alignment technique. (1991)
  • UNE Atsunobu ID: 9000020779027

    Articles in CiNii:1

    • A New Soft-handed Vacuum Chuck. (1994)
  • UNE Atsunobu ID: 9000021294170

    防衛大学校 (2010 from CiNii)

    Articles in CiNii:1

    • Lapping Simulation Based on the Gap Theory (1st Report):—Contact Condition between Workpiece and Tool and Relative Elastic Coefficient— (2010)
  • UNE Atsunobu ID: 9000022205466

    防衛大学校 (2010 from CiNii)

    Articles in CiNii:1

    • Reduction of Slurry Flow Rate in Oscillation Polishing Using a Small Tool (2010)
  • UNE Atsunobu ID: 9000242084112

    Articles in CiNii:1

    • Development of Pin-type Vacuum Chuck for Advanced Polishing (2nd report):—Influence of Polishing Pad Surface Morphology to Dimpling Caused by Pin Sustainment— (2013)
  • UNE Atsunobu ID: 9000254749603

    正会員 日本電信電話公社武蔵野電気通信研究所 (1975 from CiNii)

    Articles in CiNii:1

    • Deformation of Aluminum Alloy Plates for Magnetic Disks:Residual Stress and Deformation by Lapping (1st Report) (1975)
  • UNE Atsunobu ID: 9000254751974

    正会員 日本電信電話公社武蔵野電気通信研究所 (1983 from CiNii)

    Articles in CiNii:1

    • Surface Generation Process in Conditioning Ring Type Polishing (1st Report):Theoretical Analysis and Flatness Control (1983)
  • UNE Atsunobu ID: 9000258008740

    National Defense Academy (2012 from CiNii)

    Articles in CiNii:18

    • Fabrication of micro patterns using a drawing system with an air-pulse-type dispenser (2012)
    • Textures Produced with a Vacuum Pin Chuck (1st Report): Forming Method and Dimple Shape (2003)
    • Profile Modification for a Large-sized Wafer in Polishing (4st Report): Polishing-Head and Pressure Distribution (2003)
  • UNE Atsunobu ID: 9000313198363

    Articles in CiNii:13

    • Development of a Freezing Pin Chuck for Polishing (2nd Report):—Cooling Characteristics of a Prototype Freezing Pin Chuck and Application to Polishing— (2016)
    • Inclination Control of Grinding Head in Silicon Wafer Grinding:Grinding Force Acting on Wheel Spindle (2016)
    • High accuracy fixing technique for a wafer using water film:Thinning characteristics of water film by spinner (2016)
  • UNE Atsunobu ID: 9000329418374

    Mechanical Engineering, National Defense Academy (2015 from CiNii)

    Articles in CiNii:1

    • 1009 Development of a Freezing Pin Chuck for Fabricating a Nonwarped Substrate (2015)
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