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  • YASUMURA Kenji ID: 9000001655261

    Advanced Technology R & D Center Mitsubishi Electric Corporation (1996 from CiNii)

    Articles in CiNii:1

    • Development of ultra-fine trench isolation using a simulation technique (1996)
  • YASUMURA Kenji ID: 9000045949475

    Advanced Technology R&D Center, Mitsubishi Electric Corporation (1996 from CiNii)

    Articles in CiNii:1

    • Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process (1996)
  • Yasumura Kenji ID: 9000401661095

    Articles in CiNii:1

    • Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process (1996)
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