KAWAGUCHI Satoru
,
HIGUCHI Hisashi
,
LI Hu
,
DENPOH Kazuki
,
TAKAHASHI Kazuhiro
,
SATOH Kohki
… Electron transport coefficients, such as the mean-arrival-time drift velocity, bulk drift velocity, longitudinal bulk diffusion coefficient, and ionization coefficient, and rate coefficients for both elastic and inelastic collisions in TEOS vapor are calculated from the present cross section set using a Monte Carlo method. …
IR
DOI