Nikkuni Hiroyuki
,
Numata Chizuru
,
Yamaji Ryoto
,
Ito Hiroshi
,
Kawamata Yoshio
… <p>In this study, the transparency of SiCO thin films for optical waveguides was improved by a reactive sputtering method with O<sub>2</sub> … as the reactive gas. … increased, the following effects were observed: an increase in O<sub>2</sub>, a decrease in the absorption coefficient, a widening of the optical gap, the relaxation of the internal stress, a reduction in the refractive index, and a reduction of the mechanical strength (hardness and young's modulus). …
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