Modeling of Outgassing Characteristics in Unbaked Vacuum System

Bibliographic Information

Other Title
  • 常温排気システムのガス放出率のモデリング

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Journal

  • 真空

    真空 38 (9), 787-, 1995-09-20

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Details 詳細情報について

  • CRID
    1570009749132230144
  • NII Article ID
    10001693600
  • NII Book ID
    AN00119871
  • ISSN
    05598516
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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