Planing Process of Synthetic Diamond Films by Penning Discharge Micro-Sputtering

• FUNAMOTO Hiroyuki

  Seiko Instruments Inc

• SUGITA Toshio

  Department of Electrical Engineering, Science University of Tokyo

• NOGUCHI Kouichi

Bibliographic Information

Other Title

• マイクロ・スパッタリングによるダイヤモンド薄膜の平坦化加工

Journal

• 表面科学

  表面科学 16 (4), 258-264, 1995-04-10

Details

• CRID: 1571135649067485696
• NII Article ID: 10002115410
• NII Book ID: AN00334149
• ISSN: 03885321
• Text Lang: ja
• Data Source:
  • CiNii Articles