Focused Ion Beam Machining of Diamond Chips and Probes

• MIYAMOTO Iwao

  Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo

• KIYOHARA Shuji

  Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo

• IDE Masahiro

  Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo

• ITAMI Makoto

  Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo

• HONDA Satoshi

  Department of Applied Electronics, Faculty of Industrial Science and Technology, Science University of Tokyo

Journal

• International journal of the Japan Society for Precision Engineering

  International journal of the Japan Society for Precision Engineering 29 (4), 295-300, 1995-12-01

Keywords

• focused ion beam
• diamond chip
• surface microtopography
• diamond probe
• computer simulation

Details

• CRID: 1572543023938375936
• NII Article ID: 10002161579
• NII Book ID: AA1080710X
• ISSN: 0916782X
• Text Lang: en
• Data Source:
  • CiNii Articles