Optical Lithography Technology
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- MAGOME Nobutaka
- 1st Designing Department, IC & LCD Equipment Division, Nikon Corporation
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収録刊行物
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- International journal of the Japan Society for Precision Engineering
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International journal of the Japan Society for Precision Engineering 30 (2), 99-102, 1996-06-30
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詳細情報 詳細情報について
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- CRID
- 1571698599008164480
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- NII論文ID
- 10002161797
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- NII書誌ID
- AA1080710X
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- ISSN
- 0916782X
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles