Low Temperature Fabrication of ZrN Thin Film using an Ion Beam and Application to a VCR Cylinder
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- HIRANO Hitoshi
- New Materials R. C., Sanyo Electric Co., Ltd.
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- KURAMOTO Keiichi
- New Materials R. C., Sanyo Electric Co., Ltd.
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- DOMOTO Yoichi
- New Materials R. C., Sanyo Electric Co., Ltd.
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- KIYAMA Seiichi
- New Materials R. C., Sanyo Electric Co., Ltd.
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- TSUDA Shinya
- New Materials R. C., Sanyo Electric Co., Ltd.
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Journal
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- International journal of the Japan Society for Precision Engineering
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International journal of the Japan Society for Precision Engineering 30 (2), 140-141, 1996-06-30
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Details 詳細情報について
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- CRID
- 1571135649054846592
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- NII Article ID
- 10002161882
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- NII Book ID
- AA1080710X
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- ISSN
- 0916782X
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- Text Lang
- en
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- Data Source
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- CiNii Articles