Applications of the Surface Analysis in the Field of Industry. Surface Analysis of Semiconductor Growing Surface.

• KOBAYASHI Naoki

  NTT Basic Research Labs.

Bibliographic Information

Other Title

• 産業分野における表面分析のケーススタディ　半導体成長表面の表面分析
• ハンドウタイ セイチョウ ヒョウメン ノ ヒョウメン ブンセキ

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 47 (4), 309-312, 1996

  The Surface Finishing Society of Japan

Keywords

• Compound Semiconductor
• <i>In-Situ</i> Optical Monitoring
• Metal-Organic Vapor Phase Epitaxy
• Surface Structures
• Scanning Tunneling Microscopy

Details

• CRID: 1390282679091877888
• NII Article ID: 10002256063
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.47.309
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 3947919
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3947919
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles