反応性イオンプレーティング法によるＦｅ窒化物薄膜の作製とその耐食性評価

• 田口 正美

  秋田大学鉱山学部

• 山末 修

  秋田大学鉱山学部 現: 河西工業 (株)

書誌事項

タイトル別名

• Production of Iron Nitride Films by Reactive Ion Plating and Evaluation of Film Corrosion Resistance.
• ハンノウセイ イオン プレーティングホウ ニヨル Fe チッカブツ ハクマク

抄録

Transition metal nitrides have been used as corrosion resistant materials in recent years. To evaluate the corrosion resistance of iron nitride, iron nitride films having various compositions were produced by reactive ion plating. At a constant electron beam current the nitrogen content of the product film tended to increase as the flow rate of N₂-H₂ as the reactive gas increased. A decrease in the electron beam current used to evaporate the iron also led to an increase in the nitrogen content of the product film. X-ray diffraction showed that 7.3∼24.7 at % N nitride films had a mixed structure of α-Fe and γ′-Fe₄N, while at 26.6 at % N the films were single phase ε-Fe₃N. The amount of dissolved iron from the iron nitride film decreased with increasing nitrogen content. Corrosion of ε-Fe₃N film was apparently inhibited in 1.0kmol·m^-3 NaCl at 333K. For specimens with a mixed structure of α-Fe and γ′-Fe₄N, corrosion occurred preferentially on α-Fe. It was presumed that a portion of the α-Fe dissolved as an anode and that in this solution the reaction proceeded via a chloride as an adsorbed intermediate.

収録刊行物

• 表面技術

  表面技術 47 (4), 330-337, 1996

  一般社団法人 表面技術協会

キーワード

• Iron Nitride
• Reactive Ion Plating
• Corrosion Resistance
• Dissolution Reaction
• Sodium Chloride Solution

詳細情報

• CRID: 1390001204115168128
• NII論文ID: 10002256098
• NII書誌ID: AN1005202X
• DOI: 10.4139/sfj.47.330
• ISSN: 18843409
• ISSN: 09151869
• NDL書誌ID: 3947923
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3947923
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可