マイクロ波プラズマＣＶＤ法による種々の表面処理を施した炭素鋼基板でのダイヤモンド膜合成

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タイトル別名
  • Synthesis of Microwave Plasma CVD Diamond-Film on Variously-Coated Carbon-Steel Substrates.
  • マイクロハ プラズマ CVDホウ ニヨル シュジュ ノ ヒョウメン ショリ オ

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抄録

Diamond films were synthesized by microwave plasma chemical vapor deposition (CVD) on carbon steels with various surface treatments, including gas carbonitriding, carburizing and TiN coating. Films were analyzed for their crystallinity using Raman microprobe spectroscopy. On pure iron substrates and carbon steel with gas carbonitriding and carburizing, diamond films containing amorphous carbon grew over the powder-like graphite that was formed. On TiN-coated carbon steel substrates, diamond films with excellent crystallinity grew without the formation of the powder-like graphite. This suggests that the TiN layer inhibits Fe atom diffusion. Crystallinity and the ratio of amorphous carbon contents of diamond film have little dependence on the carbon content of the steels used in this study.

収録刊行物

  • 表面技術

    表面技術 47 (7), 611-615, 1996

    一般社団法人 表面技術協会

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