Theoretical Considerations about Total Reflection X-Ray Fluorescence for Light Element Analysis at Various Excitation Energies and Experimental Results.
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- STRELI Christina
- Atominstitute of the Austrian Universities
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- WOBRAUSCHEK Peter
- Atominstitute of the Austrian Universities
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- RANDOLF Gunther
- Atominstitute of the Austrian Universities
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- RIEDER Robert
- Atominstitute of the Austrian Universities
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- LADISICH Wolfgang
- Atominstitute of the Austrian Universities
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- AIGINGER Hannes
- Atominstitute of the Austrian Universities
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TXRF with a special energy dispersive spectrometer is well suited for analyzing light elements, such as C, N, O, F, Na, Mg and Al. The elemental sensitivity is mainly influenced by the energy of the exciting radiation. Different excitation energies from 1.7 to 17.5keV and the resulting background due to scattering on the reflector substrate under total reflection conditions were studied theoretically. The angular dependence of the fluorescence signal from low-Z atoms implanted in Si, excited by monoenergetic radiation of various energies, was calculated. The same was also done for Ti atoms implanted in Si, and compared with the measured results. The excitation energy in the experiments was monochromatized Cr-Kα radiation. In addition, results obtained with synchrotron radiation as the excitation source are presented. A detection limit of 200fg for Mg has been obtained.
収録刊行物
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- Analytical Sciences
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Analytical Sciences 11 (3), 477-481, 1995
社団法人 日本分析化学会
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詳細情報 詳細情報について
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- CRID
- 1390001204252952192
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- NII論文ID
- 10002405712
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- NII書誌ID
- AA10500785
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- COI
- 1:CAS:528:DyaK2MXmtlSrtrs%3D
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- ISSN
- 13482246
- 09106340
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可