Quantification Method Using the Inverse Velocity Dependence of Ion Intensities in Secondary Ion Mass Spectrometry: the High-Energy Method.

• HIGASHI Yasuhiro

  NTT Science and Core Technology Laboratory Group

• HOMMA Yoshikazu

  NTT Science and Core Technology Laboratory Group

Bibliographic Information

Other Title

• Quantification Method Using the Inverse

Abstract

A quantification method in secondary ion mass spectrometry called the “high-energy method” is proposed: it uses the exponential dependence of secondary ion intensities on the reciprocal of ion velocity. This method was derived from the same velocity dependence of secondary-ion emission as the infinite velocity method proposed by van der Heide, but does not require either the entire energy spectrum of each secondary ion or the special inverse velocity plot. The high-energy method is suitable for simple evaluation of concentrations ranging from several parts per million to tenths of percents.

Journal

• Analytical Sciences

  Analytical Sciences 14 (2), 281-286, 1998

  The Japan Society for Analytical Chemistry

Keywords

• Analytical Chemistry

Details

• CRID: 1390001204254648448
• NII Article ID: 130004439802
• NII Article ID: 10002414997
• NII Book ID: AA10500785
• DOI: 10.2116/analsci.14.281
• COI: 1:CAS:528:DyaK1cXislGmtr8%3D
• ISSN: 13482246
• ISSN: 09106340
• NDL BIB ID: 4450408
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4450408
• Web Site: https://link.springer.com/content/pdf/10.2116/analsci.14.281.pdf
• Web Site: https://link.springer.com/article/10.2116/analsci.14.281/fulltext.html
• Web Site: http://www.jstage.jst.go.jp/article/analsci/14/2/14_2_281/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed