Contamination, Adsorption and Reaction of Si Surface with Carbonaceous Gases. Airborne Organic Contamination in Clean Rooms and its Reduction Methods.

• WAKAYAMA Yoshihide

  Technology Research Center, Taisei Corporation

• ISHII Takakazu

  Technology Research Center, Taisei Corporation

• KOBAYASHI Sadao

  Technology Research Center, Taisei Corporation

Bibliographic Information

Other Title

• Ｓｉ表面の炭素系ガスによる汚染，吸着，反応　　クリーンルームの有機物汚染とその低減策
• クリーン ルーム ノ ユウキブツ オセン ト ソノ テイゲンサク

Journal

• Shinku

  Shinku 41 (12), 1001-1010, 1998

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679041832448
• NII Article ID: 10002475873
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.41.1001
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 971138
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I971138
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles