書誌事項
- タイトル別名
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- Properties of SOFC Having MSZ Electrolyte Thin Film Grown by PECVD.
- マイクロハ プラズマ カガク キソウ ゴウセイホウ ニ ヨル ハクマクガタ コタイ デンカイシツゼンリョウ デンチ ノ トクセイ
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抄録
Properties of magnesia stabilized zirconia (MSZ) electrolyte thin films for solid oxide fuel cells (SOFCs), which were grown by the plasma-enhanced chemical vapor deposition (PECVD) method, have been investigated on the microwave power dependencies and the anneal effect. MSZ thin films grown by microwave power of 500 W were found to be the columnar and closed electrolytes having a higher conductivity of 10-3 S/cm. A SOFC having the annealed MSZ electrolyte thin films indicated a stable power generation property with 0.5 V although its value was reduced to lower half than the theoretical OCV of 0.915 V.
収録刊行物
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- 真空
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真空 42 (3), 155-158, 1999
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282679040383232
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- NII論文ID
- 10002476190
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 4714155
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可