A New Hot Cathode Magnetron Gauge with Electric Field Controlling.

• ASAMAKI Tastuo

  Department of Electrical Engineering, Science University of Tokyo

• YAMAGUCHI Tatsuya

  Department of Electrical Engineering, Science University of Tokyo

• UDAGAWA Hitoshi

  Department of Electrical Engineering, Science University of Tokyo

• TAKEUCHI Michiro

  Department of Electrical Engineering, Science University of Tokyo

• UCHIYAMA Ryuji

  Department of Electrical Engineering, Science University of Tokyo

• KAMATA Yukiko

  Department of Electrical Engineering, Science University of Tokyo

• HOTOTA Asami

  Department of Electrical Engineering, Science University of Tokyo

Bibliographic Information

Other Title

• 電界制御熱陰極マグネトロン真空計
• デンカイ セイギョ ネツ インキョク マグネトロン シンクウケイ

Abstract

Poisson's equation, ∇²φ=-ρ/ε₀, shows that if the electric potential distribution or electric field in the space in which ions are generated is held constant, the distribution of the electric charge density is constant. By dividing the ion collectors of the gauge into two sections, and controlling the distribution ratio of ion current at a constant level against pressure, a constant distribution of the electric charge density is secured. Based upon this idea, a prototype of the magnetron gauge is built.<BR>It is found that the ion collector current is directly proportional to the pressure in a range of 1×10^-52×10^-9 [Pa].

Journal

• Shinku

  Shinku 42 (3), 187-190, 1999

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679040403712
• NII Article ID: 10002476255
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.42.187
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 4714395
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4714395
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed