Impedance Measurements for Inductive Coupled Plasmas with New Technique.

• KAWATA Hiroaki

  Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

• HONDA Minoru

  Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

• MATSUNAGA Takashi

  Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

• MURATA Kenji

  Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

Bibliographic Information

Other Title

• 新手法による誘導結合型プラズマのインピーダンス測定
• シン シュホウ ニ ヨル ユウドウ ケツゴウガタ プラズマ ノ インピーダンス ソクテイ

Abstract

We developed a new measurement system for the antenna current to obtain a plasma impedance that was hardly measured due to the low inductance of the antenna coil. When a conventional measurement system was used, the phase angle between the voltage and current was 81° for a high density Ar plasma (10¹¹ cm^-3 plasma density at 6.7 Pa). With new cancel circuit that subtracts the current flow to the coil inductance, the current was down to ten times smaller and the phase angle decreased to 54°. Both the power dissipation and the plasma density measured by the Langmuir probe were almost direct proportional to the current. It was also demonstrated theoretically that the new system is useful for the measurement of the impedance and power dissipation in plasmas.

Journal

• Shinku

  Shinku 42 (3), 337-340, 1999

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204065382400
• NII Article ID: 10002476559
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.42.337
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 4716308
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4716308
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed