Ba_<1-x>Rb_xBiO_yスパッタ薄膜の作製 The Preparation of Ba_<1-x>Rb_xBiO_y Sputtering Films
We prepared the Ba<SUB>1-x</SUB>Rb<SUB>x</SUB>BiO<SUB>y</SUB> (BRBO) thin films by rf magnetron sputtering using He+ O<SUB>2</SUB> gas (He = 80%). The XPS results indicated that the BRBO thin films contained Ba, Rb, Bi and O. From the X-ray diffraction patterns and R-T characteristics of the BRBO films, we found thet the films were (110) -oriented, and that the resistance of the BRBO film were dependent on the film thickness.
真空 42(3), 365-367, 1999-03
The Vacuum Society of Japan