HCD Coating Conditions and Properties of TiN Film with Straight-type W Cathode

• INOKUTI Yukio

  Research Raboratories, Kawasaki Steel Corp.

• SUZUKI Kazuhiro

  Research Raboratories, Kawasaki Steel Corp.

• TAKAHASHI Natsuki

  Industrial Equipment Division, ULVAC JAPAN, Ltd.

• OHKUBO Osamu

  Industrial Equipment Division, ULVAC JAPAN, Ltd.

Bibliographic Information

Other Title

• ストレート型のWカソード使用によるホローカソード放電コーティング条件とTiN膜質

Journal

• 真空

  真空 42 (3), 424-, 1999-03

Details

• CRID: 1570854174089263616
• NII Article ID: 10002476734
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles