SiC Film Structure Determined by Normal Vibration Calculations

• NAKAMURA Shigeaki

  Takamatsu National College of Technology

• SAITO Nobuo

  Takamatsu National College of Technology

• YOSHIOKA Shoji

  Takamatsu National College of Technology

• NAKAAKI Isamu

  Shizuoka Prefectural Fuji Industrial Institute

Bibliographic Information

Other Title

• 基準振動による炭化ケイ素膜の構造解析

Journal

• 真空

  真空 42 (3), 454-, 1999-03

Details

• CRID: 1571980073996085504
• NII Article ID: 10002476811
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles