Analysis of Incident Ions Inner Surface of Magnetic Microwave Plasma Etching Chamber

• KAWADA Hiroki

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• KITSUNAI Hiroyuki

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• TSUMAKI Nobuo

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• KATSUYAMA Masanori

  Device Development Center, Hitachi, Ltd.

• SUZUKI Shinichi

  Device Development Center, Hitachi, Ltd.

Bibliographic Information

Other Title

• 有磁場マイクロ波プラズマエッチング容器内壁面への入射イオンの分析

Journal

• 真空

  真空 42 (3), 483-, 1999-03

Details

• CRID: 1571135649065990272
• NII Article ID: 10002476902
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles