極高真空技術から見た表面科学

• 金持 徹

  広島電機大学工学部電子工学科

• 田中 誠

  広島電機大学工学部電子工学科

書誌事項

タイトル別名

• A Comment on Relation between the Recently Developed Extremely High Vacuum Technology and the Surface Science.
• キョクコウ シンクウ ギジュツ カラ ミタ ヒョウメン カガク

抄録

In Japan, the extremely high vacuum technology has been studied in these ten years in manycompanies and institutes. Now it is not so difficult to obtain the extremely high vacuum in a system which is not so expensive. However, this new technique is not yet used in Japan widely. In this comment, several examples of important relations between the results of surface science studies and the residual gas pressures in which the studies were done. And it is recommended to the surface scientists to use this new vacuum technology in their laboratory.

収録刊行物

• 真空

  真空 42 (4), 521-524, 1999

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679040248064
• NII論文ID: 10002476961
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.42.521
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 4750691
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4750691
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可