Proparation of hard theick films by laser asisted plasma coating
-
- UMEHARA Hiroyuki
- National Institute of Mateials and Chemical Research(NIMC)
Bibliographic Information
- Other Title
-
- レーザアシスト容射による硬質膜の作製
Search this article
Journal
-
- 大会講演概要
-
大会講演概要 88 233-234, 1995-04-14
- Tweet
Details 詳細情報について
-
- CRID
- 1573950398839886464
-
- NII Article ID
- 10002556243
-
- NII Book ID
- AN10268641
-
- Text Lang
- ja
-
- Data Source
-
- CiNii Articles