Principle of energy-filtering transmission electron microscopy and its applications.

• KURATA Hiroki

  Department of Materials Science and Engineering, Japan Atomic Energy Research Institute

Bibliographic Information

Other Title

• エネルギーフィルター電子顕微鏡法の原理と応用
• エネルギー フィルター デンシ ケンビキョウホウ ノ ゲンリ ト オウヨウ

Abstract

Energy-filtering transmission electron microscopy (EFTEM) is widely used to make images and diffraction patterns more quantitative by removing the inelastic background, and to perform elemental and chemical mapping at high spatial resolution.The principal factors restricting the spatial resolution in elemental maps are discussed. The relativistic effect on inelastic scattering cross-section, which becomes significant for high-voltage EFTEM analysis, is also discussed in relation to the detection efficiency of core-loss signals.

Journal

• Nihon Kessho Gakkaishi

  Nihon Kessho Gakkaishi 39 (6), 416-425, 1997

  The Crystallographic Society of Japan

Details

• CRID: 1390001204085589376
• NII Article ID: 10002590047
• NII Book ID: AN00188364
• DOI: 10.5940/jcrsj.39.416
• ISSN: 18845576
• ISSN: 03694585
• NDL BIB ID: 4390636
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4390636
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed