Nano-scaled Controllability Microstructure of Magnetic Thin Films by Applying Ultra Clean Sputtering Process

• TAKAHASHI Migaku

  Dept. Electronic Engng. , Tohoku Univ.

Bibliographic Information

Other Title

• クリーン化プロセスによる磁性薄膜の微細構造制御 -ハードディスクを例として-

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 20 284-a-284-b, 1996-09-01

Details

• CRID: 1571980074002652032
• NII Article ID: 10002729445
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles