Control of Particle Generation in CVD Reactor by Ionization of Source Vapor

Bibliographic Information

Other Title
  • ソースガスのイオン化によるCVD成膜装置内での粒子発生の抑制

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Details

  • CRID
    1570291224134347264
  • NII Article ID
    10002782558
  • NII Book ID
    AA11498601
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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