Control of Particle Generation in CVD Reactor by Ionization of Source Vapor
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- ADACHI Motoaki
- Research Institute for Advanced Science and Technology, Osaka Prefecture University
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- HAYASI Tadao
- Dept. Chemical Engineering, Hiroshima University
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- FUJIMOTO Toshiyuki
- Dept. Chemical Engineering, Hiroshima University
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- OKUYAMA Kikuo
- Dept. Chemical Engineering, Hiroshima University
Bibliographic Information
- Other Title
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- ソースガスのイオン化によるCVD成膜装置内での粒子発生の抑制
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Journal
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- エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology
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エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology 14 180-182, 1997-08
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Details
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- CRID
- 1570291224134347264
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- NII Article ID
- 10002782558
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- NII Book ID
- AA11498601
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- Text Lang
- ja
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- Data Source
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- CiNii Articles