Morphology and Electric Characteristic of Conductive Zinc Oxide Fine Particles Generated by Aerosol Process

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  • SETO Takafumi
    Department of Energy Engineering, Mechanical Engineering Laboratory, AIST, MITI
  • AYA Nobuhiro
    Department of Energy Engineering, Mechanical Engineering Laboratory, AIST, MITI
  • OKUYAMA Kikuo
    Department of Chemical Engineering, Hiroshima Univensity
  • HATA Takeshi
    Department of Chemical Engineering, Hiroshima Univensity

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Other Title
  • エアロゾルプロセスによって製造した導電性酸化亜鉛微粒子の形態と電気特性
  • エアロゾル プロセス ニ ヨッテ セイゾウ シタ ドウデンセイ サンカ アエン

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Abstract

White colored and highly conductive (electric resistivity ∼10 Ωcm) fine particle of aluminum doped zinc oxide is generated by gas phase reaction of zinc vapor, aluminum acetate vapor and oxygen. The morphology and crystal structure of generated particles is measured by electron microscopies and x-ray diffraction. From experimental results, it is found that the chemical stoiochiometry of zinc, aluminum and oxygen, (Zn : Al : O), is important parameter to control both particle morphology (size, shape and color) and electric characteristic. It is also found that the resistivity of produced particles decrease with water vapor addition, since water vapor may assist decomposition of aluminum acetate.

Journal

  • Earozoru Kenkyu

    Earozoru Kenkyu 13 (4), 337-342, 1998

    Japan Association of Aerosol Science and Technology

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