Measurement of the Gradient between the Bending Field and the Vertical Line at the SR Magnet
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- Matsuda Tetsuya
- Mitsubishi Electric Corporation
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- Yamamoto Shunji
- Mitsubishi Electric Corporation
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- Toshie Takeuchi
- Mitsubishi Electric Corporation
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- Nakamura Shiro
- Mitsubishi Electric Corporation
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- Yamada Tadatoshi
- Mitsubishi Electric Corporation
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- Iwamoto Masatami
- Kagawa University
Bibliographic Information
- Other Title
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- SRリング用超電導電磁石の偏向磁界の傾き測定法の提案と測定結果
- SR リングヨウ チョウデンドウデンジシャク ノ ヘンコウ ジカイ ノ カタム
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Abstract
We developed SR compact superconducting magnets which are used for X ray lithography. If the vertical axis of the superconducting coil of SR magnet is out of the vertical line the horizontal field Bx will be appeared. The electron beam is kicked toward vertical direction by this field and this causes a large electron beam orbit distortion in the horizontal coordinate. From the beam optics, the gradient of the coil axis needs to be less than 1 mrad. We developed a magnetic field distribution measurement system of the horizontal magnetic field Bx(s) in the high bending magnetic field By0 which is 3.5T at the center of the SR (Synchrotron Radiation) magnet and measured the distribution of Bx(s) . Where, s is the beam direction. From the horizontal magnetic field Bx(s) and vertical dipole field By0(=3.5T), we can evaluate the gradient of bending field from the vertical direction. The average gradient along S direction was 0.55mrad. This value satisfies our requirement which is less than 1mrad.
Journal
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- IEEJ Transactions on Industry Applications
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IEEJ Transactions on Industry Applications 118 (9), 1056-1062, 1998
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204659515392
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- NII Article ID
- 10002817392
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- NII Book ID
- AN10012320
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- ISSN
- 13488163
- 09136339
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- NDL BIB ID
- 4548593
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed