A multiple imaging system using holographic optical elements for excimer laser machining
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- Sasagawa Tomohiro
- Mitsubishi Electric corp
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- Yamamoto Tatsuya
- Mitsubishi Electric corp
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- Inoue Mitsuo
- Mitsubishi Electric corp
Bibliographic Information
- Other Title
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- ホログラフィック光学素子を用いたエキシマレーザ加工用多重結像光学系
- ホログラフィック コウガク ソシ オ モチイタ エキシマ レーザ カコウヨウ
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Abstract
We propose a novel excimer laser machining using a multiple imaging system employing a holographic optical element (HOE). The multiple imaging system can generate many images from one mask pattern. The HOEs that we used were com-puter generated phase holograms.<br>We calculated the HOE by with the following three-step optimization using a direct binary search algorithm, 1) high efficiency enhancement step, 2) uniforming step and 3) noise reduction step. By this optimization procedure, a diffraction efficiency over 60% was obtained, the uniformity errors were less than 2%, and noise peak was less than 5% of signal peaks. The optimized HOE pattern was 4-level, and the matrix size was 1024×1024 with 1 micron pixels. To obtain a large HOE area, we tiled the optimized HOE pattern, and manufactured 30×30mm HOEs on a quartz substrate by dry etching.<br>With the use of this HOE, the 95 holes whose diameter was 0.1mm were drilled in a 10×10mm area. The energy avalil-ability was 19.4%. When a conventional mask-projection system is used, the energy availability is usually less than 1% owing to the small rate of the mask open area, A multiple imaging system using HOE can machine small holes at an efficiency up to 20 times that of conventional mask-projection system.
Journal
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- IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Fundamentals and Materials 117 (6), 571-578, 1997
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679577276672
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- NII Article ID
- 10002822057
- 20000445641
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- NII Book ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL BIB ID
- 4216156
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed