Prepararion of Ferroelectric Pb-Zr-Ti-O Thin Films by KrF Excimer Laser Ablarion Technique
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- Kurogi Hiromitsu
- Kumamoto University
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- Yamagata Yukihiko
- Kumamoto University
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- Ikegami Tomoaki
- Kumamoto University
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- Ebihara Kenji
- Kumamoto University
Bibliographic Information
- Other Title
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- エキシマレーザアブレーション法によるPb-Zr-Ti-O強誘電体薄膜の作製
- エキシマ レーザ アブレーションホウ ニヨル Pb Zr Ti O キョウ ユ
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Abstract
Pb (Zr1-x, Tix) O3 (PZT) ferroelectric thin films were prepared using the excimer laser ablarion technique. Optical emission of the PZT plasma plume was studied to understand the quantitative relation between the PZT film quality and the ablation plume plasma state. We identified the spectral lines originated in Pb, Pb+, Zr, Zr+, Ti, Ti+, O, O+, PbO, ZrO and TiO. These spectral intensities and dynamics have remarkable dependence on ambient O2 pressure. The X-ray diffraction patterns showed that the PZT films propared on MgO (100) substrate at 600°C and with a laser fluence of 2J/cm2 have a perovskite-pyrochlore mixed structure. The condition of 13Pa oxygen pressure provided high quality perovskite films. The ferroelectric properties of the Au/PZT/Pt/MgO structure were studied. The PZT perovskite structure (00l) was obtained on Pt (200)/MgO (100) substrate at 650°C. Polarizationelectric field curve for a PZT films with 200nm thickness showed a remanent polarization of 20μC/cm2 and a dielectric constant of 500.
Journal
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- IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Fundamentals and Materials 117 (8), 873-880, 1997
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204600368512
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- NII Article ID
- 130006839900
- 10002822647
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- NII Book ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL BIB ID
- 4266942
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed