PECVDによる燃料電池用ジルコニア薄膜の作製

• 岡山 英夫

  大阪工業大学

• 長田 昭義

  大阪工業大学

• 伊佐 弘

  大阪工業大学

書誌事項

タイトル別名

• PreParation of Zirconia Thin Fi1ms for SOFC by PECVD
• PECVD ニヨル ネンリョウ デンチヨウ ジルコニア ハクマク ノ サクセイ

抄録

Thin films of magnesia stabilized zirconia (MSZ) for solid oxide fuel cell (SOFC) were prepared on Si (100) substrate by plasma-enhanced chemical vapor deposition (PECVD) using zirconium alkoxide, Zr(0-nBu)₄, and magnesium acetyl-acetonate, Mg(C₅H₇O₂)₂. It is seen from Plasma spectroscopic measurement that the oxygen radical produced in a reduced pressure of 0.2 mTorr can be sufficiently facillitated the elimination and adsorption reactions of organometallic compounds. MSZ fi1m was obtained at deposition pressure of 0.5 mTorr and substrate temperature of 400°C by PECVD of Zr(O-nBu)₄ and Mg (C₅H₇O₂)₂, which were transported with nitrogen carrier gas. Furthermore, this film was grown in a columnar structure with deposition rate of about 12nm/min. It is also found that when MSZ film was annealed at temperature ranges from 600°C to 1000°C, it has Partially stabilized zirconia (PSZ) structure without Phase transition to a monoclinic Phase.

収録刊行物

• 電気学会論文誌．　Ａ

  電気学会論文誌．　Ａ 117 (9), 936-941, 1997

  一般社団法人 電気学会

キーワード

• 固体電解質型燃料電池
• マグネシア安定化ジルコニア
• ECRプラズマ

詳細情報

• CRID: 1390282679577070720
• NII論文ID: 130006839891
• NII論文ID: 10002822751
• NII書誌ID: AN10136312
• DOI: 10.1541/ieejfms1990.117.9_936
• ISSN: 13475533
• ISSN: 03854205
• NDL書誌ID: 4284286
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4284286
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/117/9/117_9_936/_pdf
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