Wet Etching Rate of Nickel/Iron Alloy.
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- HATATE YASUO
- Department of Applied Chemistry and Chemical Engineering, Kagoshima University
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- FURUKAWA YUJI
- Department of Applied Chemistry and Chemical Engineering, Kagoshima University
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- ONO TERUO
- Department of Applied Chemistry and Chemical Engineering, Kagoshima University
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- YOSHIZAWA HIDEKAZU
- Department of Applied Chemistry and Chemical Engineering, Kagoshima University
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- UEMURA YOSHIMITSU
- Department of Applied Chemistry and Chemical Engineering, Kagoshima University
Bibliographic Information
- Other Title
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- ニッケル/鉄合金のウェットエッチング速度
- ニッケル テツ ゴウキン ノ ウェット エッチング ソクド
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Abstract
The etch rate of 42 Alloy in iron (III) chloride etchant is measured in order to investigate the effects of agitation speed, etchant concentration, temperature, co-existing foreign metal ions and resist hole diameter. The rate increased at first and gradually decreased in accordance with increasing etchant concentration. The activation energies are 12 and 24-30 kJ/mol at a low concentration and at a higher concentration, respectively. Foreign metal ions in etchants significantly suppressed the etch rate. The etch rate increased with decreasing diameter of the resist hole due to the effect of side etch.
Journal
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- KAGAKU KOGAKU RONBUNSHU
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KAGAKU KOGAKU RONBUNSHU 24 (1), 152-154, 1998
The Society of Chemical Engineers, Japan
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Details 詳細情報について
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- CRID
- 1390282679485398016
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- NII Article ID
- 10002835093
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- NII Book ID
- AN00037234
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- ISSN
- 13499203
- 0386216X
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- NDL BIB ID
- 4380962
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed