Micro-Machining Technique Rearized with Synchrotron Radiation

• HIRATA Yoshihiro

  Harima Research Laboratories Sumitomo Electric Industries, Ltd.

• OKUYAMA Hiroshi

  Harima Research Laboratories Sumitomo Electric Industries, Ltd.

• NUMAZAWA Toshiyuki

  Harima Research Laboratories Sumitomo Electric Industries, Ltd.

• TAKADA Hiroshi

  Harima Research Laboratories Sumitomo Electric Industries, Ltd.

Bibliographic Information

Other Title

• シンクロトロン放射光を用いた微細加工

Journal

• レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan

  レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 223 27-32, 1995-12

Details

• CRID: 1573950398820710912
• NII Article ID: 10002878773
• NII Book ID: AA11604414
• Text Lang: ja
• Data Source:
  • CiNii Articles