Ablation of Wide Band Gap Semiconductors by VUV-UV Laser

• ZHANG J.

  Institute of Physical and Chemical Research(RIKEN)

• SUGIOKA K.

  Institute of Physical and Chemical Research(RIKEN)

• WADA S.

  Institute of Physical and Chemical Research(RIKEN)

• TASHIRO H.

  Institute of Physical and Chemical Research(RIKEN)

• TOYODA K.

  Department of Applied Electronics, Science University of Takyo

• MIDORIKAWA K.

  Institute of Physical and Chemical Research(RIKEN)

Journal

• レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan

  レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 244 15-19, 1997-09-24

Keywords

• Microfabrication
• SiC
• GaN
• UV
• VUV and laser ablation

Details

• CRID: 1571698599006986496
• NII Article ID: 10002879447
• NII Book ID: AA11604414
• Text Lang: en
• Data Source:
  • CiNii Articles