Micro machining with copper vapor laser

• OKAZAKI K.

  Toshiba

• MUKAI N.

  Toshiba

• KOBAYASHI N.

  Toshiba

• SANO Y.

  Toshiba

• KONAGAI C.

  Toshiba

• HIROTA K.

  Toshiba FA Sys. Eng.

Bibliographic Information

Other Title

• 銅蒸気レーザーによる微細加工

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 17 148-, 1997-01-01

Details

• CRID: 1571135649053899264
• NII Article ID: 10002882194
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles