Study on Improvement of Defect Detection Using Photoacoustic Effect of Semiconductor Laser

• TERADA Hidetoshi

  Aichi Institute of Technology

• TSUDA Norio

  Aichi Institute of Technology

• YAMADA Jun

  Aichi Institute of Technology

Bibliographic Information

Other Title

• 半導体レーザーの光音響効果を用いた欠陥検出の精度向上に関する研究

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 19 113-, 1999-01-01

Details

• CRID: 1574231873797736832
• NII Article ID: 10002883697
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles