光散乱法によるナノメータオーダの粒径測定法の開発

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タイトル別名
  • Designing a new apparatus for measuring particle sizes of the order of nanometer by light-scattering.
  • ヒカリ サンランホウ ニ ヨル ナノメータオーダ ノ リュウケイ ソクテイホウ

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抄録

The present research aims at developing a method for measuring particle sizes of order of nanometer (nm) on the raw Si wafer using a light-scattering method with Ar+ laser. According to the analysis for Mie and Rayleigh scattering theories, the measuring system is developed to detect the particle of nm order sizes with the ellipsoidal reflector collecting extremely weak light, the detected processing system, and the several optical instruments. Furthermore, a melting problem of the particle irradiated by the laser is clarified by analyzing the heat conduction to a particle theoretically. Consequently, it was verified theoretically that the measuring method developed in this study is applicable for detecting the nm order sizes nondestructively.

収録刊行物

  • 精密工学会誌

    精密工学会誌 54 (11), 2132-2137, 1988

    公益社団法人 精密工学会

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