Preparation of Fine Silicon Nitride Powders by Vapor Phase Reaction of Nitrogen-Containing Organosilicon Compound with Ammonia

• SUZUKI T.

収録刊行物

• J. Ceram. Soc. Jpn.

  J. Ceram. Soc. Jpn. 95 75-79, 1987

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• CRID: 1573950398892962816
• NII論文ID: 10003381976
• データソース種別:
  • CiNii Articles