書誌事項
- タイトル別名
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- Roughness measurements of supersmooth surface by laser light scattering.
- レーザ ハンシャ サンランコウ ニ ヨル チョウ セイミツ セッサクメン ノ
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抄録
A laser light scattering technique was investigated for application to non-contact roughness measurement. Roughness parameters were evaluated from the distribution of scattered light intensity by using the principle of optical Fourier transformation. This technique coincided closely with the stylus method in the range of 0.004-0.02μmRrms (0.02-0.1μmRz). Air blowing eliminates the effects of residual cutting fluid on the surface to be measured. This technique can be easily applied to on-machine measurements due to low vibration disturbance, convenient measuring distance, and simple instrumentation.
収録刊行物
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- 精密工学会誌
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精密工学会誌 54 (5), 865-870, 1988
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679774109184
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- NII論文ID
- 110001369577
- 10003433012
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
- http://id.crossref.org/issn/09120289
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- NDL書誌ID
- 3180453
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可