書誌事項
- タイトル別名
-
- Study on Micro-machined Profile Measurement by means of Optical Inverse Scattering Reconstruction Phase Method. Phase Retrieval of Periodic Fine Profile.
- ヒカリ ギャク サンランイ ソウホウ ニヨル ビサイ カコウ ケイジョウ ケイ
- Phase Retrieval of Periodic Fine Profile
- 周期微細溝形状の位相回復
この論文をさがす
抄録
A new optical measuring method which can be applied to in-process measurement of micro-machined surface profile with an accuracy of submicrometer order is proposed. The principle of measurement is based on the optical Fourier transform and phase retrieval method. The phase information is retrieved by applying logarithmic Hilbert transform and Fourier series expansion to two Fraunhofer diffraction intensities, which are related to square of the modulus of Fourier transform of object field, with and without an exponential filter at the object plane. In order to verify the validity of the proposed method, first, computer simulations of reconstruction of the fine groove models are performed. Second, the inverse scattering phase measuring system consisting of Fourier transform optical arrangement with an exponential filter is developed. And the measurements of the fine triangular groove with the pitch of 4.75μ m and the height of 0.2μ m which is fabricated by ultra precision diamond turning are carried out. It is found that the proposed measurement method is effective for reconstructing the profile of a submicrometer size workpiece without scanning probe and stylus.
収録刊行物
-
- 精密工学会誌
-
精密工学会誌 62 (7), 958-963, 1996
公益社団法人 精密工学会
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1390282679741249664
-
- NII論文ID
- 110001367730
- 10003573319
-
- NII書誌ID
- AN1003250X
-
- ISSN
- 1882675X
- 09120289
- http://id.crossref.org/issn/09120289
-
- NDL書誌ID
- 3985331
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可