Influence of backscatterd electron for spacial resolution of small area analysis using AES
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- MAKIISHI Noriko
- Technical Research Laboratories, Kawasaki Steel Corp.
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- 山本 公
- Technical Research Laboratories, Kawasaki Steel Corp.
Bibliographic Information
- Other Title
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- AES微小域分析における後方散乱電子の影響
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Journal
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- 材料とプロセス : 日本鉄鋼協会講演論文集 = Current advances in materials and processes : report of the ISIJ meeting
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材料とプロセス : 日本鉄鋼協会講演論文集 = Current advances in materials and processes : report of the ISIJ meeting 10 (3), 700-, 1997-03-27
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Details 詳細情報について
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- CRID
- 1573387448927979392
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- NII Article ID
- 10003797884
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- NII Book ID
- AN10056461
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- ISSN
- 09146628
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- Text Lang
- ja
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- Data Source
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- CiNii Articles