Texture Formation of Ti Films Deposited on (011)[100] Single Crystal of Silicon Steel and Stainless Steel Sheets by Different Ion Plating Methods

• Inokuti Yukio

  Research Laboratories, Kawasaki Steel Corp.

Bibliographic Information

Other Title

• Texture Formation of Ti Films Deposited

Abstract

In order to clarify the difference in the textures of the Ti films made on (011)[100] single crystal of silicon steel and stainless steel sheets, Ti coatings by the hollow cathode discharge (HCD) and electron beam (EB)+radio frequency (RF) methods were made on the surfaces of the polished silicon steel and stainless steel samples. Pole figures of the textures of the Ti and these samples were measured simultaneously using a SSD (solid state detector) auto pole figure apparatus.<BR>A {1010}_Ti pole figure of the Ti films deposited on the (011)[100] single crystal of silicon steel by the HCD method showed a dominant {1010}[1210] oriented texture. In contrast, a {1010}_Ti pole figure of the Ti films done by the EB+RF method showed a weaker texture than that by the HCD.<BR>On the other hand, {1010}_Ti pole figures of the Ti films deposited on the stainless steel sheets by the HCD and EB+RF methods showed no preferred orientation.<BR>In the scanning electron microscope observation, the three-dimensional surface roughness of the Ti films on the (011)[100] single crystal of silicon steel was slightly smoother than that of the stainless steel sheet.<BR>It is considered that, due to the higher ionization by the HCD method than by EB+RF, it was possible for the Ti films to form the dominant {1010}[1210] texture and the smooth surface. Also, it should be noticed that the dominant {1010}[1210] texture of the Ti films was formed peferentially on the surface of the (011)[100] single crystal of silicon steel with a 3.5% between [1210]_Ti and [100]_Si-steel atomic distances.

Journal

• Materials Transactions, JIM

  Materials Transactions, JIM 39 (11), 1126-1134, 1998

  The Japan Institute of Metals

Keywords

• (011)[100] single crystal of silicon steel
• stainless steel sheet
• titanium film
• orientation relationship
• coherency
• texture of thin titanium film
• hollow cathode discharge
• electron beam+radio frequency
• dual phase
• ionization of titanium

Details

• CRID: 1390282679224873216
• NII Article ID: 130003422541
• NII Article ID: 10003804659
• NII Book ID: AA10699969
• DOI: 10.2320/matertrans1989.39.1126
• COI: 1:CAS:528:DyaK1MXjvVCguw%3D%3D
• ISSN: 2432471X
• ISSN: 09161821
• NDL BIB ID: 4606287
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4606287
• Web Site: https://www.jstage.jst.go.jp/article/matertrans1989/39/11/39_11_1126/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed