Reconstruction of LSI concave microstructures by parameter sensitivity search in the best-fitting method.

Author(s)

Journal

  • J. Electron. Microsc.

    J. Electron. Microsc. 43, 356-360, 1994

Cited by:  4

Codes

  • NII Article ID (NAID)
    10003986910
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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